Microelectromechanical systems
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20-10-2010, 12:35 PM

.doc   mems.doc (Size: 4.82 MB / Downloads: 159)

Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology - MST (in Europe).
MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors[1]. At these size scales, the standard constructs of classical physics are not always useful. Because of the large surface area to volume ratio of MEMS, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass.
The potential of very small machines was appreciated before the technology existed that could make them—see, for example, Richard Feynman's famous 1959 lecture There's Plenty of Room at the Bottom. MEMS became practical once they could be fabricated using modified semiconductor device fabrication technologies, normally used to make electronics. These include molding and plating, wet etching (KOH, TMAH) and dry etching (RIE and DRIE), electro discharge machining (EDM), and other technologies capable of manufacturing small devices. An early example of a MEMS device is the resonistor – an electromechanical monolithic resonator.[2][3]


Those who don’t have a strong background in MEMS and want to get a global understanding of the technology, I speculate that they now have reached to the most difficult question of “Why MEMS?”
A finical consultant once said in a Business Awareness Workshop (I attended lately) that the main challenge for any new technology in the market is to offer one of three things:

• Enabling a new function
• Providing significant cost reduction
• Or both!!!
Actually, the answer to this question is "Both". "Applications Using MEMS-Based Components" section will illustrate that there is a lot features available in our world that could never be achieved without MEMS technology. The section after it shows how MEMS cost can usually be reduced by mass production
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10-05-2011, 11:30 AM

A lot of seminar and presentations are available relating to MEMS. Please visit this thread to select your topic:
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seminar and presentationproject and implimentationsThread-microelectromechanical-systems
seminar and presentationproject and implimentationsThread-micro-electro-mechanical-systems
Use Search at http://topicideas.net/search.php wisely To Get Information About Project Topic and Seminar ideas with report/source code along pdf and ppt presenaion
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05-03-2013, 02:01 PM

Micro Electro Mechanical System [MEMS]

.pptx   Micro Electro.pptx (Size: 3.14 MB / Downloads: 19)


Microelectromechanical systems (MEMS) are micron-size devices that can sense or manipulate the physical world.
MEMS are made up of components between 10 to 100 micrometers in size (i.e. 0.01 to 0.1 mm) and MEMS devices generally range in size from a 20 micrometers (20 millionth of a meter) to a millimeter (thousandth of a meter).

History of MEMS

The invention of the transistor at Bell Telephone Laboratories in 1947 sparked the fast-growing microelectronic technology industry.
Jack Kilby of Texas Instruments built the first integrated circuit (IC) in 1958 using germanium (Ge) devices.
The first high-volume pressure sensor was marketed by National Semiconductor in 1974 - it included a temperature controller for constant-temperature operation.
Around 1982, the term micromachining came into use to designate the fabrication of moving micromechanical parts.

Components of MEMS

MEMS can include two or more
of the following subsystems: sensors, actuators, a power supply, a central processing unit (CPU)
or microprocessor, and/or a communication interface.

Medical Applications

Disposable Blood Pressure Sensors
MEMS transducer senses blood pressure through a silicon-based dielectric gel between the sensor and the saline solution.
Drug delivery
MEMS devices can be positioned in the body by implantation or by the traditional pill.

MEMS in Defense

Cyborg insects with MEMS that will run remotely controlled reconnaissance missions for the military. MEMS sensors, such as video cameras, audio microphones, and chemical sniffers so that they could move into enemy territory in swarms to perform reconnaissance missions otherwise dangerous for soldiers.
Smart dust: A tiny wireless sensors (MEMS), robots and devices, installed with wireless communications, that can detect anything from light and temperature to vibrations.

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