vibrational modes of MEMS-resonators full report
Thread Rating:
  • 0 Vote(s) - 0 Average
  • 1
  • 2
  • 3
  • 4
  • 5
computer science topics
Active In SP

Posts: 610
Joined: Jun 2010
17-06-2010, 12:47 PM

Presented By:
S.G. Lokhre, K. Virwanif , B. Gajananf , S.P. Pai, P.R. Apte

Solid State Electronics Department
Tata Institute of Fundamental Research
Homi Bhabha Road
Colaba, BOMBAY - 400 005, India


We have designed, fabricated and tested a balanced doubly suspended versatile, torsion and flexural, MEMS resonator structure. The doubly suspended structure has been used earlier for very precise high Q resonators but we wished to study the various vibration modes of such a structure. FEM analysis has been used to compute the most likely 6 modes and their frequencies of free vibration. These modes include flexure, torsion and mixed modes. The arms of the resonator are deposited with magnetic films so as to give desired bending/twisting moments to the structure. The location of the films decides the symmetry and thus result in one of the six vibrational modes that are predicted by the FEM analysis. This paper describes the design, fabrication and measurements on resonator structures made at TIFR.


Traditionally silicon has been the bane of transistor and integrated circuit (IC). It paved on the way to very large scale integrated circuits (VLSI) wherein the device structures were of the order of few microns. Apart from this phenomenal success in the field of microelectronics, silicon has now provided the micro-electromechanical-systems (MEMS) wherein micron sized structures are fabricated in single crystals of silicon as mechanical sensing devices.

These microstructures made of SiO2 having dimensions 1-10 micron in width and 50-100 micron in length were suspended over a 100 micron deep cavity in silicon. The 100 micron X 100 micron square cavity was obtained by a crystallographic etchant KOH. Such microstructures then bend or vibrate in the cavity formed giving a 3D like effect to the devices. Some of the microstructures fabricated in our laboratory 1 are as follows namely Cantilevers, Cross-bridges, Spirals, Doubly suspended resonators, Micro-probes, Magnetic sensors etc. These microstructures were subjected to different treatments for different applications, like evaporation of metals for thermal applications or sputtered with magnetic materials for magnetic actuator like applications etc.

read full report
Use Search at wisely To Get Information About Project Topic and Seminar ideas with report/source code along pdf and ppt presenaion
project topics
Active In SP

Posts: 2,492
Joined: Mar 2010
10-05-2011, 11:29 AM

A lot of seminar and presentations are available relating to MEMS. Please visit this thread to select your topic:
topicideashow-to-seminar and presentation-on-application-of-mems-technology
topicideashow-to-seminar and presentation-report-on-mems-switches
seminar and presentationproject and implimentationsThread-microelectromechanical-systems
seminar and presentationproject and implimentationsThread-micro-electro-mechanical-systems
Use Search at wisely To Get Information About Project Topic and Seminar ideas with report/source code along pdf and ppt presenaion

Important Note..!

If you are not satisfied with above reply ,..Please


So that we will collect data for you and will made reply to the request....OR try below "QUICK REPLY" box to add a reply to this page

Quick Reply
Type your reply to this message here.

Image Verification
Please enter the text contained within the image into the text box below it. This process is used to prevent automated spam bots.
Image Verification
(case insensitive)

Possibly Related Threads...
Thread Author Replies Views Last Post
  full authority digital engine control ppt jaseelati 0 138 09-01-2015, 04:46 PM
Last Post: jaseelati
  six sigma full report computer science technology 10 12,748 19-05-2012, 04:42 PM
Last Post: seminar ideas
  Parking Guidance System full report smart paper boy 3 2,788 16-02-2012, 11:59 AM
Last Post: chrisharris
  FILTER FABRIC full report smart paper boy 0 1,524 18-06-2011, 11:44 AM
Last Post: smart paper boy
  Treatment of Distillery Wastewater Using Membrane Technologies full report project topics 1 10,366 11-03-2011, 03:18 PM
Last Post: seminar class
Thumbs Up RF MEMS SWITCH MARKET projectsofme 1 3,437 20-01-2011, 04:51 PM
Last Post: seminar surveyer